.nner)、加温器及烤箱、冷藏器、反应性离子蚀刻机(RIE)、 真空蒸镀机 (Thermal Evaporator)、溅镀机 (Sputter)、 高温炉 ( Furnace )、曝光对准机(Aligner)、光阻涂布机(Spinner)，制程包含晶 片清洗、光阻涂布、曝光显影...
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... 热力学第二定律 Thermal conductivity 热导真空计 thermal evaporator 热蒸镀机 Thermal velocity ...
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Vacuum Thermal Evaporator 真空热蒸发器 ; 真空热蒸镀机
thermal medium evaporator 热载体蒸发器
Thermal siphon evaporator 热虹吸蒸发器
The capacity matching and system's stability are two important aspect for the matching of thermal expansion valve with plate evaporator.
热力膨胀阀与板式蒸发器的匹配问题包括容量匹配和系统稳定性要求两方面的要求。
A multiple evaporator CPL coupled with two water loops directly and two air thermal control units indirectly was developed and tests were conducted to investigate its instantaneous characteristics.
建立了与两个液态水单相流体回路直接耦合，与两个空气通风回路间接耦合的多蒸发器CPL系统，并通过实验对该系统的瞬态运行特性进行了研究。
The modules of important thermal power system equipments such as steam turbine, evaporator, steam-water separator and pipe are developed. System testing and application works are also completed.
完成了汽轮机、蒸发器、汽水分离器、管道等热力系统典型设备模块的开发工作，并进行了相应的系统测试和应用研究。
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